Combined SIMS-SFM Instrument for the 3-Dimensional Chemical Analysis of Nanostructures

The 3D NanoChemiscope NMP project started on 15th September 2008, under the 7th Framework Programme of the European Commission. Its aim is to develop an innovative and novel combination of a new TOF-SIMS with substantially optimized lateral resolution of down to at least 10 nm and with improved sensitivity, combined with a new high resolution ultra-high vacuum SFM.

For the first time ever, the combination of the two techniques will provide as of yet unavailable complementary information on nanoscale surface chemistry and surface morphology in one machine at the same time.

Download Project Brochure: 3D NanoChemiscope.pdf

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Supported by FP 7 of the European Commission